The multi-stage vacuum system and gaseous secondary electron detector(GSED) for environmental scanning electron microscope(ESEM) were simply introduced and the basic principle of ESEM was discussed.
本文简单介绍了构成环境扫描电镜(ESEM)的多级真空系统和气体二次电子探测器,描述了ESEM的基本工作原理。
The vacuum and heat preserving apparatus of BGO detector using steam compressing are introduced, and temperature effect on energy resolution of BGO detector are discussed.
采用蒸汽压缩式制冷方法制作了BGO探测器真空保温系统,并探讨了温度对BGO探测器能量分辨率的影响。
The integrated Pirani vacuum sensor system in this work can be applied for the gas pressure detector in the medium and rough vacuum measurement.
本文研制的集成皮拉尼传感器系统能够作为气压检测器应用于中真空和粗真空的测量。
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