deep uv lithography 远紫外线光刻 ; 深紫外曝光
UV-lithography 紫外光刻
proximity UV-lithography 接近式紫外光刻
UV deep lithography 紫外深度光刻
The design of a new kind of UV or DUV lithography lenses is described in this paper.
设计了一种新的紫外或深紫外光刻物镜。
The 2-d simulation of thick SU-8 photoresist profile after UV lithography is presented.
这篇论文是厚su - 8光刻胶接触式UV光刻后形貌的两维模拟。
UV lithography, silicon etching and soft lithography were adopted to fabricate micropillar arrayed cell culture substrates.
以紫外光光刻、硅蚀刻及软光刻技术制备了微柱阵列型细胞培养基底。
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