In general, MEMS devices are mm size in overall and um size in local. Thus, the testing technical is required to have high spatial resolution and large field of view.
一般来说，MEMS器件具有毫米级的整体尺寸和微米级的局部尺寸，因此，测试技术要求尽可能同时具有大视场、空间分辨率高的性能。
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