By comparing the ultra-precision stage developed at home and abroad, the conclusion can be drawn as follows: ceramic material, aerostatic guideway and direct drive technology are the key technology of ultra-precision stage.
通过对国内外大行程超精密平台的比较分析以及前人的论述,可得出如下结论:陶瓷材料、空气静压导轨、直接驱动技术是超精密平台的关键技术,比其他方式更有优越性。
参考来源 - 基于材料选择的精密工作台控制系统研究Tests indicate that this method efficiently reduces force ripples at various velocities. The moving standard deviation of tracking error is reduced to 40% and the steady-state tracking error of the ultra-precision stage is significantly improved.
控制平台实验表明:该方法在不同的运动速度下都能够有效地解决推力波动抑制问题,系统轨迹跟踪误差的移动标准差降低到原来的40%,超精密工作台的稳态跟踪误差明显减小。
参考来源 - 永磁同步直线电机推力波动建模与抑制·2,447,543篇论文数据，部分数据来源于NoteExpress
Motion control system of an ultra precision wafer stage with application to integrated circuit production was presented.
描述一种应用于集成电路制造的超精密硅片台系统及其运动控制。
The stage is also the base of designing ultra precision machine tools.
该精密运动平台也是研制超精密加工机床的基础。
With the increasing demands for higher accuracy and higher productivity of the ultra-precision equipments, ultra-precision gas bearing stage systems driven by linear motor become research hotspots.
随超精密装备加工精度和生产率的不断提高，直线气浮系统得到广泛重视和研究。
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