Used for ULSI manufacturing line, semiconductors manufacturing plants and Ultra clean laboratory.
ULSI制造工厂、半导体制造工厂、超净实验室、研究室等。
Various CVD technologies for preparing low dielectric constant materials in ULSI circuits are summarized.
综述了制备uls I低介电常数材料的各种CVD技术。
Shift from al to Cu interconnects in Ultra-Large Scale Integrate (ULSI) is important for semiconductor industry.
利用铜代替铝作为超大规模集成电路的互连接线，代表了半导体工业的重要转变。
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