... top down design 自顶向下设计 top electrode 上电极 top loaded vertical antenna 顶部加载竖直天线 ...
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top-electrode 顶电极
Reflectivemicromirror, optical fiber grooves and top electrode of static electricity driven torsion beamstructure are fabricated on (100) silicon wafer (or (110) silicon wafer).
微反射镜、光纤槽和静电驱动扭臂结构的上电极是在(100)硅片(或(110)硅片)上制作,制作工艺简单,反射镜和光纤槽是通过一次掩膜在 KOH 溶液中腐蚀出来。
参考来源 - 体硅微机械光开关的设计与制作工艺的研究·2,447,543篇论文数据,部分数据来源于NoteExpress
Aluminium is used as the top electrode metal.
通过掩模蒸铝形成顶部电极。
Note the top electrode is guarded, so that only current flowing across the insulator is measured by the picoammeter.
注意,顶部的电极接保护,所以只有流经绝缘体表面的电流才为皮安计所测量。
The electrostatic actuator has a top electrode, a bottom electrode, and an insulating film disposed between the top electrode and the bottom electrode.
上述静电型致动器具有上部电极、下部电极及在上述上部电极和上述下部电极间配置的上述绝缘膜。
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