through ion implantation method
(3) through ion implantation method, injecting same ions of semiconductor material to area needed to be etched in order to destroy crystal characteristics of semiconductor material in the area to turn semiconductor material in monocrystal to structure of non crystal;
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through ion implantation method
通过离子注入法
以上为机器翻译结果，长、整句建议使用 人工翻译 。