Lithography光刻 Thin Film and Oxidation薄膜及氧化 PECVD在粗化的GaN wafer上沉积SiO2结块问题endura 溅射退火清除表面沾污求助!
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Weak erosion before plating, in a certain: remove metal parts in the solution of surface extremely thin oxidation film, and make the process of surface activation.
弱浸蚀:电镀前,在一定组成溶液中除去金属制件表面极薄的氧化膜,并使表面活化的过程。
It is mainly reason that wet and salt spray environment and thin film of chemical oxidation.
潮湿的盐雾环境和化学氧化膜的薄而软是引起腐蚀的主要原因。
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