micro-heater and temperature sensor 微加热器和温度传感器
Heater, cooler and temperature sensor are installed in the air channel.
风道内安装有加热器、制冷器、温度传感器。
Using micromachining technology, we also integrated micro-heater and temperature sensor on the chip.
利用微加工技术，我们还将微加热器和温度传感器集成到本芯片上。
The Pt electrodes, Pt heater and Pt temperature sensor are deposited first.
首先，沉积金属铂电极，加热棒和温度传感器。
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