The Neutral Beam Injection (NBI) system requires a clean high vacuum environment. The liquid helium cryocondensation pump with high pumping speed is an ideal vacuum obtain device.
中性束注入系统要求有洁净的动态高真空环境，大抽速液氦冷凝泵是满足此要求的理想真空获得设备。
The system of VPI equipment mainly includes vacuum chamber, heating unit, worktable with its drive unit, vacuum pumping unit, gas-charge unit and control unit, etc.
该设备主要出密封罐、加热系统、升降工作台、真空系统、充气系统、控制系统及密封罐水冷系统等组成。
At the appropriate pressure, the chamber is opened to a high-vacuum pumping system that continues to reduce the pressure of the process chamber.
在适当的压强下，工艺室被接通高真空泵系统抽气，以继续降低工艺室的压强。
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