Control system design and analysis of EUVL stage. Based on the mechanism above designed, control model and strategies are built to realize both precise positioning and synchronous scanning.
设计了工件台控制系统,针对工件台的精密定位和同步扫描提出了相应的控制策略。
参考来源 - 极紫外光刻机工件台精密机械及控制相关技术·2,447,543篇论文数据，部分数据来源于NoteExpress
Carbazole was determined by synchronous scanning with solid-substrates room temperature phosphorescence (SS-RTP).
本文采用同步扫描固体基质室温磷光(SS - rtp)法测定水样中的咔唑。
A new microcomputer-controlled versatile spectrofluorometer with the function of constant energy and variable-angle synchronous scanning has been developed.
报道一种微机控制带恒能量同步扫描和可变角同步扫描的多功能荧光分光计。
In the field blanking period of transmission line field synchronizing signal, so that the charge, the synchronous scanning, to accurately reproduce the original image.
在行场消隐期间传送行场同步信号，使收、发的扫描同步，以准确地重现原始图像。
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