The morphology of worn surface was analyzed via scanning electron microscope (SEM) and by using a surface profilometer.
通过扫描电子显微镜（SEM）和表面轮廓仪分析配副材料的磨痕表面形貌。
Compared with sputter crater depth results measured with surface profilometer, the converted depth results obtained by GD-OES were accurate and credible.
辉光光谱定量转化所得深度结果与表面形貌仪测定相应溅射坑的深度结果对比发现，本方法定量转化深度结果准确可靠。
Profilometer - a tool that is used for measuring surface topography.
表面形貌剂-一种用来测量晶圆片表面形貌的工具。
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