【surface_micromachining】什么意思_英语surface_micromachining的翻译_音标_读音_用法_例句_在线翻译

surface micromachining

电子、通信与自动控制技术

表面微加工 - 引用次数：3
参考来源 - 静电排斥驱动六边形MEMS微镜 Hexagon MEMS Micromirror Actuated by Electrostatic Repulsive Force

·2,447,543篇论文数据，部分数据来源于NoteExpress

abstract: Unlike Bulk micromachining, where a silicon substrate (wafer) is selectively etched to produce structures, surface micromachining builds microstructures by deposition and etching of different structural layers on top of the substrate. Generally polysilicon is commonly used as one of the layers and silicon dioxide is used as a sacrificial layer which is removed or etched out to create the necessary void in the thickness direction.

以上来源于: WordNet

Porous silicon used as a sacrificial layer has some important applications in surface micromachining technology.

多孔硅作为一种牺牲层材料，在表面硅微机械加工技术中有着重要的应用。

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Surface micromachining USES select materials and both wet and dry etching processes to form the circuitry layers.

表面微机械加工使用选择的材料和干法和湿法蚀刻工艺以形成电路层。

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Using surface micromachining techniques allows applications of up to nearly 100 finely applied layers of circuit patterns on one chip.

采用表面微机械加工技术允许多达近100精细的应用在一个芯片上的电路图案层的应用。

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