By microwave designing for substrate heating materials, the larger uniform temperature field areas than the diameter of substrate holder in MPCVD device is obtained.
通过对基片加热材料的微波设计，在MPCVD装置中获得大于基片台直径的均匀温度分布区。
To further increase deposition rates, the filament array is biased negatively with respect to the substrate holder so that a DC plasma is also maintained between the substrate and filament array.
为进一步提高沉积速度，对灯丝组施加相对于基底夹持器的负偏压，使得在基底和灯丝组之间的DC等离子体也得以保持。
The lens holder comprises a lens holder top part and a lens holder bottom part, wherein the lens holder bottom part and the image sensor are loaded on the substrate.
所述镜座包括一镜座顶部与镜座底部，所述镜座底部与所述影像感测器承载于所述基板上。
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