... submicron lithography 亚微米光刻 submicron aerosol 亚微米气溶胶 submicron resolution 亚微米分辨率 ...
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Deep submicron lithography 深亚微米光刻
deep submicron lithography technology 深亚微米光刻技术
submicron projection lithography lenses 亚微米投影光刻物镜
The earlier research has been focused on modeling thin chemically amplified photoresist for submicron lithography and little has been made on modeling thick chemically amplified photoresist.
早期对化学放大胶的研究主要集中在薄的应用于亚微米光刻的化学放大胶,而很少涉及到对厚的化学放大胶的建模。
参考来源 - SU·2,447,543篇论文数据，部分数据来源于NoteExpress
In this article, deep submicron lithography and nano processing are reviewed.
本文综述了深亚微米光刻和纳米光刻技术。
Experimental results of deep submicron lithography with a excimer laser are reported in this paper.
报道用远紫外准分子激光进行亚微米光刻的实验结果。
The earlier research has been focused on modeling thin chemically amplified photoresist for submicron lithography and little has been made on modeling thick chemically amplified photoresist.
早期对化学放大胶的研究主要集中在薄的应用于亚微米光刻的化学放大胶，而很少涉及到对厚的化学放大胶的建模。
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