... spot wobble 光点摆动 submicron device 亚微米器材 submicron positive dry etch resist 亚微米正性干法刻蚀抗蚀剂 ...
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Deep submicron device 深亚微米器件
ultra deep submicron device 超深亚微米器件
Submicron Device Physics and Technology 次微米元件物理技术
submicron scale mos device 亚微米尺寸金属氧化物半导体器件
submicron ldd device 亚微米ldd器件
submicron semiconductor device 亚微米半导体器件
When the characteristic size reach micron, submicron degree, overcoming the "limit" binding in order to increase the integration of device.
当特征尺寸进入到微米、亚微米量级时，需要克服“极限”束缚，增加器件的集成度。
The experimental results show that submicron level plane positioning accuracy can be achieved by the precision positioning device based on laser Moire signal.
实验结果表明，基于激光莫尔信号的精密定位装置可获得亚微米级的平面定位精度。
This paper presents the building procedures of hydrodynamic model for submicron semiconductor device simulation.
主要讨论了亚微米半导体器件模拟的流体动力学模型方程的建立过程。
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