At present, the semiconductor devices used in the manufacturing process of etching technology, in the lab has produced sub-micron mechanical components.

目前，利用半导体器件制造过程中的蚀刻技术，在实验室中已制造出亚微米级的机械元件。

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This ERM was prepared in super-clean lab with high pure reagents and sub-packed in 20 ml ampoules, No significant differences in concentration among sub-samples were found.

本标准样品采用高纯试剂在超净间中准确配制，分装于20 毫升安瓿内，经均匀性检验合格。

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