It is found that the calculating method accuracy may be improved from the level of nanometer to that of sub-nanometer.

结果表明，混合多步误差分离法可将计算方法的准确度由纳米级提高到亚纳米级。

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The experiments show that the phase scanning method is right and innovative and the ability of the sub-nanometer space increment is reached.

实验结果表明，本文捉出的相位扫描方法原理正确，具有创新性，达到了变栅距光栅所要求的亚纳米级的栅距变化精度。

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The integrated systems range up to several hundred micrometers, and its sensitivity reaches nanometer, sub-nanometer or even pico-meters (10-12 m).

本集成系统的量程高达几百个微米，而它的灵敏度却可以达到纳米、亚纳米，甚至皮米(10 - 12 m)。

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The key to cracking that nut is apparently the new thermal assisted optical element Fujitsu's developed, allowing for an ultra-tiny sub-hundred nanometer optical spot size, which in turn should enable recording on the one terabit (not byte, let's not get crazy here) per square inch level.

ENGADGET: Fujitsu building a bigger, smaller hard drive