The alloy compositions preferably are formed into sputtering targets used for thin film applications.
所述的合金组合物优选形成为用于薄膜应用领域的溅射靶。
Silver alloy reflective films for optical information recording media, silver alloy sputtering targets therefor, and optical information recording media.
光学信息记录介质用银合金反射膜，为此的银合金溅射靶，以及光学信息记录介质。
The plasma can be 4 generated by hot-cathode discharge or RF discharge of gas. In addition, the device has four metal plasma sources, two magnetron sputtering targets, cold and hot target supports.
真空室内的气体等离子体可由热灯丝或射频放电产生，4另外还配置了4个金属等离子体源、两套磁控溅射靶和冷却靶台。
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