The source material for a sputtering process.
溅射工艺用源材料。
A method to predict the sputtering efficiency of a target is also described as well as a system for quantifying the texture homogeneity of a polycrystalline material.
还公开了一种用于预测一种目标的溅射效率的方法以及一种用于量化多晶物质的结构均匀性的系统。
A novel low temperature switch material VO2 thin film was fabricated by ion-sputtering and annealing.
采用离子束溅射和退火工艺制备了一种新的相变型薄膜vo2。
应用推荐