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Vacuum sputter coating has better stability than smearing film while smearing film has better response electric characteristics than vacuum sputter coating.
真空镀膜稳定性比涂膜好,涂膜的响应、导电性比真空镀膜好。
The heating equipment of vacuum sputter coating apparatus always sparks during sputtering, Using metal-screening and surface earth can solve this problem well.
真空溅射镀膜设备中加热装置在镀膜时常出现打火现象,本文采用金属屏蔽和外壳接地的方法很好地解决了这一问题。
This article introduces processing of plasma chemistry and application of sputter coating and plasma-enhanced chemical vapor deposition in powder metallurgy especially.
介绍了等离子体化学工艺,特别着重介绍了溅射镀膜与等离子体化学气相沉积在粉末冶金中的应用。
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