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After analyzed the effect of preload voltage and sweep voltage on the negative electrostatic spring stiffness, a method to dissociate mechanical stiffness from the system stiffness has been provided.
通过分析预载电压和扫频信号幅值对静电负刚度的影响，提出了从系统刚度中分离出挠性梁机械刚度的计算方法。
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