To improve the physico-chemical properties,the spin-on low-k films are treated by NH_3 plasma.
为了改进旋涂低k薄膜的性质,论文研究了NH_3等离子体表面处理对低k薄膜化学性质的影响。
参考来源 - 基于SiOC低k介质及其掺杂薄膜的研究
·2,447,543篇论文数据，部分数据来源于NoteExpress
Spinon
abstract:Spinons are one of three quasiparticles, along with holons and orbitons, that electrons in solids are able to split into during the process of spin–charge separation, when extremely tightly confined at temperatures close to absolute zero.
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