soft lithography 软微影技术 ; 软刻蚀 ; 软光刻技术 ; 软光刻
multilayer soft lithography 多层软蚀刻技术
lift-up soft lithography 揭起软光刻技术
soft contact lithography 软接触式光刻
soft interference lithography 软性干涉光刻技术
soft X-ray lithography 软X射线光刻
soft x ray projection lithography 软x射线投影光刻
以上来源于: WordNet
Processes of SU-8 photoresist mold and polymer elastomeric stamp were researched in order to solve the technology of the key part—elastomeric stamp in the soft-lithography.
为了解决软光刻技术中核心元件弹性印章的制备技术，对SU-8胶印模和聚合物弹性印章进行了工艺研究。
Some polymer materials are used as substrate. Kinds of new microfabrication technology are presented, including lithography, soft etching, LIGA, DEM and bonding, etc.
系统介绍了芯片实验室的各种制备技术，这些技术包括紫外光刻、软刻蚀、LIGA技术、DEM技术、键合等。
A sheet molded with hundreds of perforations, from 10 to 100 microns across, can be manufactured using soft lithography and set down on another surface.
他们可以利用软微影术制造一片东西，上面戳有数百个直径10 ~ 100微米的小孔，然后将之覆盖在另一表面上。
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