...料学;反应直流磁控溅射;SiO2薄膜;性能 [gap=658]Key words】 materials science; reactive d.c. magnetron sputtering; SiO2film; properties ...
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富钙SiO2薄膜 calcium enriched silica films
多孔sio2薄膜 porous silica film ; porous silica thin film
过渡SiO2薄膜 buffer silica film
非晶SiO2薄膜 amorphous SiO2 films
SiO2薄膜辅助 SiO2 film assist
掺氟SiO2薄膜 SiOF thin film
氟掺杂SiO2薄膜 fluorine-doped SiO2 films
有序介孔SiO2薄膜 Ordered mesoporous silica films
纳米多孔SiO2薄膜 nanoporous silica films
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