The integration of silicon tip and cantilever is realized by the two techniques. This work lays a good foundation for the micro cantilever probe applying in the sensing fields.
采用两种方法均实现了硅尖和悬臂梁工艺的兼容,达到了预期目标,为硅微悬臂探针在传感器中的应用打下了良好的基础。
参考来源 - 硅微悬臂梁探针的制备工艺研究The distribution of the electric field of metal tip is calculated by finite element method first. Then an approach to the same case of silicon tip was achieved.
首先采用有限元方法求解了金属尖端的电场分布,在此基础上,求得了硅微尖的近似电场分布。
参考来源 - 硅微尖的场发射电子能谱·2,447,543篇论文数据,部分数据来源于NoteExpress
应用推荐