The design and fabrication of a novel deformable mirror based on silicon micromachining technology was presented in this paper.

给出基于硅微加工技术的一种新型可变形反射镜的设计和加工方法。

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Porous silicon used as a sacrificial layer has some important applications in surface micromachining technology.

多孔硅作为一种牺牲层材料，在表面硅微机械加工技术中有着重要的应用。

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The consequences are benefit to Silicon electrochemical micromachining technology and the technology will be hopeful to become an new technology about Silicon deep-holes etching technology.

其结果对进一步开展这方面的研究工作具有指导意义，在进一步深入开展研究电化学体硅微加工技术时，可有望成为实现硅深孔列阵加工的新技术。

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That work is still ongoing at MIT, but the pair left, with the idea of using the same silicon micromachining technology to build tiny "reformers" that could separate pure hydrogen from alcohol for fuel cells.

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