crystal silicon membrane 单晶硅薄膜
circular silicon membrane 圆形硅膜
molecular sieve silicon membrane 分子筛硅膜
pyrolysis silicon based membrane 硅基裂解膜
The frequency was enhanced by means of optimizing the thin silicon membrane's size, periodic structure parameters as well as the thickness of the ridge area. Therefore, the resonance frequency (MHz upwards) was achieved via simulation calculation.
通过理论分析优化硅薄膜尺寸、周期结构参数和脊区厚度,模拟计算出谐振频率即使达到MHz以上,薄膜机械灵敏度也仍可保持nm/Pa量级。
参考来源 - 基于MEMS技术的光纤声传感器研究·2,447,543篇论文数据,部分数据来源于NoteExpress
Currently, the most commonly studied nanochannel is a silicon nanopore, made by drilling a hole through a silicon membrane.
目前,最常见纳米通道的研究是通过在硅表面钻了一个洞的硅纳米孔。
The fabrication of submicron vertical silicon screen is a key step for fabricating Josephsonjunction coupled by vertical silicon membrane.
亚微米垂直硅墙的制备是垂直硅薄膜耦合约瑟夫逊结的关键工艺。
The stroke volume of the chamber is enlarged when the thickness of aluminum membrane is increased or that of silicon membrane is decreased.
减薄硅膜厚度和增加铝膜的厚度也能增大泵腔体积变化量。
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