A method to make blazed silicon gratings is designed. The fabrication of (100) and (111) silicon wafer grating is performed by bulk silicon techniques.
设计了一种制作闪耀硅光栅的方法，利用体硅加工技术分别进行了(100)面硅片和(111)面硅片光栅的制作，对光栅的表面进行了测试。
参考来源 - 用于生化分析的光谱仪微小型化的研究·2,447,543篇论文数据，部分数据来源于NoteExpress
An arrayed waveguide grating (AWG) demultiplexer with total internal reflection (TIR) mirrors is designed based on silicon-on-insulator (SOI) material.
设计了一种基于绝缘体上的硅材料的全内反射型阵列波导光栅解复用器件。
The fabrication process of a compact planar waveguide etched-grating(EDG) demultiplexer based on silicon-on-insulator(SOI) is studied.
研究了基于绝缘材料上的硅（SOI）材料的平面波导刻蚀光栅分波器的主要制作工艺。
应用推荐