The design and fabrication of a novel deformable mirror based on silicon micromachining technology was presented in this paper.
给出基于硅微加工技术的一种新型可变形反射镜的设计和加工方法。
The characteristics and requests of micromachining for silicon based sensors are introduced. The conventional methods of si substrate microfabrication are briefly described.
叙述了硅基传感器微机械加工的特点和要求，简要说明了硅衬底微细加工的常用方法。
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