文章详细信息 关键词: 硅烷;光声光谱 [gap=475]Keywords: SiH4,photoacoustic spectrum.
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In other words, in a binary blend of SiH4 and NF3, concentrations of silane greater than or equal to 0.66% and less than or equal to 95.3%, form an explosive mixture.
换句话说,在硅烷和NF3的二元混合物中,硅烷的浓度大于或等于0.66%和小于或等于95.3%,都会形成爆炸性混合物。
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