Due to the parasitic capacitance and weak output signal, which is limited by its dimensions, it is difficult to improve the resolution and stability of micro accelerometer efficiently.

在测量硅微电容式加速度传感器时，由于器件信号的微弱和寄生电容的干扰，提高加速度的稳定性和分辨率非常困难。

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When AC signal of microsyn output was demodulated to DC output, distribution capacitance may cause DC output self excitation.

在交流信号被解调成直流输出时，分布电容易引起输出级自激。

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The relationship between input angle and output differential capacitance is presented for the realization of the capacitance signal detection of micro electromagnetic disk levitating gyroscope.

为了实现磁悬浮转子微陀螺的电容检测，使用数值积分方法计算了新型磁悬浮转子微陀螺的电容值与转子倾斜角度的关系。

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