In the second part of the paper, a photomask glass-based microchip was wet etched with buffered HF. And the problems of side etching and mask erosion were researched.
其次,论文的第二部分采用湿法刻蚀的方法制作了以photomask玻璃为基体材料的微分析芯片,并研究了湿法刻蚀中的侧蚀和掩模穿孔问题。
参考来源 - 基于硅材料与玻璃的微分析芯片制作技术的研究·2,447,543篇论文数据，部分数据来源于NoteExpress
The protection of the circuits on chip is also needed to consider in the front-side etching.
对芯片的正面结构释放时同样需要考虑保护芯片上的电路。
A process of acid etching one side of float glass to obtain a distinctive, uniformly smooth and sati.
这是一个通过酸蚀浮法玻璃来获得一种与众不同，光滑均匀，像绸缎一样的玻璃的过程。
The prototype features a unique 3D air-breathing cathode structure fabricated using KOH etching and double-side lithography.
其特点在于，利用KOH体硅腐蚀和双面光刻工艺制作了一种独特的三维自吸氧阴极结构。
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