contact shunt rf mems switch 并联接触式mems开关
DC-contact shunt 并联接触
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The switching element consists of a thin metallic membrane, which has the metal-isolator-metal contact with a capacitive shunt switch as SPST.
开关为一薄金属膜桥组成的桥式结构，形成一个SPST并联设置的金属-绝缘体-金属接触。
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