We deduced a expressions for threshold voltage temperature coefficient of short channel MOST.

推导了了一个短沟道MOST阈值电压温度系数表达式；

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The model includes the substrate bias effect, the short channel effect and the relation between these two effects.

它综合考虑了衬偏效应、短沟道效应以及两者之间的关系。

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The short channel effects , the structure of LDD and SOI, phaseshift mask and multilevel interconnection were included.

LDD和SOI结构； 移相掩模光刻技术和多层金属布线工艺。

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