Based on the rf (radio frequency) sheath model, the equation for ion momentum when reaching the material surface was derived.
利用射频鞘层模型，推出了离子到达被加工材料表面时的动量的表达式。
Based on the radio frequency sheath model, the equations for ion velocity, density, and energy flux colliding on the material surface are derived.
在射频鞘层模型基础上，推出了离子轰击材料表面的速度、浓度及能量通量的表达式。
Some numerical results have been obtained for the instantaneous sheath thickness, the instantaneous voltage and the ion flux density on the substrate, etc.
采用数值方法模拟出鞘层的瞬时厚度及极板的瞬时电位变化、鞘层内离子密度和电场强度等物理量的时空变化。
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