shallow trench isolation
- 浅沟隔离：一种半导体器件制造技术，通过在晶圆表面挖掘浅沟并在其中填充绝缘材料来隔离不同的电路元件，以减少电路之间的干扰和交叉耦合效应。
Shallow trench isolation
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abstract:
Scaling of isolation with transistor size. Isolation pitch is the sum of the transistor width and the trench isolation distance.
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