Abstract: a pressure sensor which can cancel thermal zero shift is described.
文摘：提出一种可消除热零点漂移的压阻式压力传感器。
An effective method has been proposed to cancel the zero shift of the sensor.
针对传感器零点漂移问题，提出了首次测量补偿法。
Several compensation methods of thermal sensitivity shift of polysilicon pressure sensor are introduced, whose principles and characteristics are discussed.
列举了几种多晶硅高温压力传感器的热灵敏度漂移补偿方法，并分别讨论了它们的原理及特点。
应用推荐