The resistance of the metal probe to semiconductor contact can be quite high.
金属探头与半导体接触时的电阻可能相当高。
In this paper, a probe of vacuum microbalance to monitor and measure for high accuracy of film thickness is introduced, thermostatic probe of the semiconductor refrigeration device.
本文研制了一种用于高精度膜厚监测的真空微量天平探头：半导体致冷器件恒温探头。
Probe card, method of designing the probe card, and method of testing semiconductor chips using the probe card.
探针卡，该探针卡的设计方法，以及使用该探针卡测试半导体芯片的方法。
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