Plasma processing technology is a new technology developed in semiconductor manufacturing.
等离子体加工技术是在半导体制造中创立起来的一种新技术。
The processes of energy transfer of semiconductor surface irradiated by picosecond laser pulses are studied. Discussion is focussed on energy transfer from the electron-hole plasma to the lattice.
在皮秒脉冲激光辐照时，半导体材料表面的能量转换过程中，重点讨论能量从电子-空穴等离子体到晶格的转换过程。
Plasma in radio frequency (rf) glow discharge is widely used in the preparation of semiconductor film materials and microelectronic industry.
射频辉光放电等离子体在微电子及半导体薄膜材料生长等方面有着广泛的应用。
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