A new approach to improve the selectivity of semiconductor gas sensors is put forth.
本文提出一种提高半导体电阻式气敏元件选择性的新方法。
An automated test system for semiconductor gas sensors is constructed in this thesis.
本文组建了一套用于半导体气体传感器的自动测试系统。
Currently, micro gas sensors have become one of the major MEMS fields, and semiconductor gas sensors are the mainstream.
制作微型化的气体传感器是MEMS应用的主要领域之一。半导体气敏传感器,是当前MEMS气敏传感器的主流。
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