In chapter4, the whole fabrication process, experiment results and some SEM photos are given. At last, the resistance of the probe card is measured, and the results meet our request well.
第四章给出了具体的探卡整个工艺流程、实验结果以及探卡局部的SEM照片，最后给出探卡的导通电阻测试结果，符合预期目标。
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