Optical heterodyne magnetic rotation enhanced velocity modulation spectroscopy (OH-MR-VMS) is an absorption spectroscopic technique for selective detection of the molecular ions.
光外差磁旋转速度调制光谱技术是一种对离子分子选择性测量的高灵敏激光吸收光谱技术。
RF power modulation is used to control the codeposition and the selective silicon removal steps with the later proceeds whenever the RF power is turned off or reduced to a low level.
使用RF功率调变控制该共沉积作用及该选择性硅去除步骤，后者步骤总是在关闭该R F功率或是将其降至低水准时进行。
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