The piezoelectric scanner is one of the key components of scanning probe microscope.
三维压电陶瓷扫描器是扫描探针显微镜的关键部件。
A general trend of Scanning Probe Microscope (SPM) is to multiple functionality and digitalization.
扫描探针显微镜(SPM)当前的发展趋势是功能复合化和数字化。
The influence of external vibration on scanned images of scanning probe microscope (SPM) is discussed.
探讨了外界激振对扫描探针显微镜(SPM)扫描图像的影响。
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