A new optical interferometer suitable for using in the scanning force microscope is presented. The cantilever itself is used as a micro interferometer element.
目前在扫描力显微镜中经常用到的氮化硅三角形探针本身可以作为一个基于点微射干涉的微干涉元件。
Micro cantilever probe of atomic force microscope (AFM) is a typical micro mechanical component, which is under a coupling deformation during the contact scanning process.
原子力显微镜（AFM）的微探针系统是典型的微机械构件，它在接触扫描过程处于耦合变形状态。
This paper briefs the principle and some advance of scanning tunneling microscope (STM) and atomic force microscope (AFM).
介绍了扫描隧道显微镜(STM)和原子力显微镜(afm)的原理和目前情况。
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