A new optical interferometer suitable for using in the scanning force microscope is presented. The cantilever itself is used as a micro interferometer element.
目前在扫描力显微镜中经常用到的氮化硅三角形探针本身可以作为一个基于点微射干涉的微干涉元件。
In this thesis, Scanning Force Microscopy (SFM) was used to study the nanoscale electric phenomena of the surface and interface properties of ferroelectric thin films.
本论文利用扫描力显微镜研究了铁电薄膜表面与界面的电势及电畴等微区性质。
It is demonstrated that the detection sensitivity can be greatly improved, and the resolution of SFM (scanning force microscopy) image can reach nanometer order of magnitude.
实验结果表明,检测灵敏度大大提高,扫描力显微(SFM)像的分辨率可达纳米量级。
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