The scanning rotation mirror is one of the most important components in laser scanning detecting system.
扫描转镜是激光扫描探测系统的重要组成部分。
Effect distribution curves of scanning interval and defect sizes on detecting results are obtained by experiment, and it can supply references to detect defect sizes reasonably.
通过实验，给出了缺陷尺寸和扫描间隔等因素对检测结果影响的分布曲线，为合理提取缺陷尺寸提供了参考。
This article, introduces setting up of reflectance confocal microscope which is divided into four parts:optical system, scanning system, detecting system and software controlling system.
介绍了反射式共聚焦光学系统的搭建，整个过程分为显微镜光学系统、扫描装置、检测系统、软件控制四个部分。
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