Tube scanner′s structure errors have great effect on the measurement accuracy of Scanning Probe Microscope(SPM).

单管式扫描器的结构误差是影响扫描探针显微镜测量精度的主要误差因素之一。

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A calibration method for the non-linearity of the Scanning Probe Microscope (SPM) "s PZT scanner was described."

针对扫描探针显微镜的压电扫描器提出一种非线性校正方法。

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