Rapid thermal process (RTP) was used in the intrinsic gettering (IG) process of fast neutron irradiated CZSi.

将快速热处理（RTP）引入到快中子辐照掺氮直拉硅的内吸杂工艺中。

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Rapid thermal process (RTP) was first used in the intrinsic gettering (IG) process of fast neutron irradiated CZSi.

首次将快速热处理（RTP）引入到快中子辐照直拉硅的内吸杂工艺中。

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