With the increase of the implantation voltage, the root-mean-square roughness (RMS) of Zr films almost don't change.

随着注入高压的增加，薄膜的表面粗糙度均方根（RMS）值的变化不大。

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Stabilization is achieved by adopting an amplitude stabilizer. The root mean square (RMS) of energy output is lowered from about 4% to below 1%.

采用稳幅器件有效地提高了输出能量的稳定性，放大前级的输出能量波动的均方根值从4%左右降到1%以下。

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It is verified that the measurement of the self-designed curvature sensor is correct, the error percent of peak-valley value (PV) is 10%, and the error percent of root mean square (RMS) is 2%.

制备的光栅型波前曲率传感器测量结果正确，峰谷值存在10%的误差，均方根值存在2%的误差。

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